JPS6445759U - - Google Patents
Info
- Publication number
- JPS6445759U JPS6445759U JP13997687U JP13997687U JPS6445759U JP S6445759 U JPS6445759 U JP S6445759U JP 13997687 U JP13997687 U JP 13997687U JP 13997687 U JP13997687 U JP 13997687U JP S6445759 U JPS6445759 U JP S6445759U
- Authority
- JP
- Japan
- Prior art keywords
- casing
- slide plate
- sample
- movable
- operating screw
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007740 vapor deposition Methods 0.000 claims description 2
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13997687U JPS6445759U (en]) | 1987-09-16 | 1987-09-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13997687U JPS6445759U (en]) | 1987-09-16 | 1987-09-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6445759U true JPS6445759U (en]) | 1989-03-20 |
Family
ID=31403727
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13997687U Pending JPS6445759U (en]) | 1987-09-16 | 1987-09-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6445759U (en]) |
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1987
- 1987-09-16 JP JP13997687U patent/JPS6445759U/ja active Pending